Chin. J. Semicond. > 2001, Volume 22 > Issue 10 > 1269-1273
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CONTENTS

SiO_x调制的三元硅化物(Co_(1-x)Ni_x)Si_2外延

韩永召 , 李炳宗 , 茹国平 , 屈新萍 , 曹永峰 , 徐蓓蕾 , 蒋玉龙 , 王连卫 , 张荣耀 and 朱剑豪

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Key words: 三元硅化物, 固相反应, 外延

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    Received: 20 August 2015 Revised: Online: Published: 01 October 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(10): 1269-1273
      韩永召, 李炳宗, 茹国平, 屈新萍, 曹永峰, 徐蓓蕾, 蒋玉龙, 王连卫, 张荣耀, 朱剑豪. SiO_x调制的三元硅化物(Co_(1-x)Ni_x)Si_2外延[J]. 半导体学报(英文版), 2001, 22(10): 1269-1273.
      Citation:
      韩永召, 李炳宗, 茹国平, 屈新萍, 曹永峰, 徐蓓蕾, 蒋玉龙, 王连卫, 张荣耀, 朱剑豪. SiO_x调制的三元硅化物(Co_(1-x)Ni_x)Si_2外延[J]. 半导体学报(英文版), 2001, 22(10): 1269-1273.
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      • Received Date: 2015-08-20

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