Abstract: The transport,kinetics,and growth process of ZnO single crystal fabricated by the chemical vapor transport method (CVT) are studied through analyzing the effect of temperature gradient and calculating the transport efficiency.The factors which limit growth rate and crystal quality are discussed within the framework of the theories of vapor-solid phase crystallization and growth kinetics.Finally,we identify the CVT growth mechanism of ZnO,which is supported by our experimental results of high quality,large ZnO single crystals.

Key words: chemical vapor transport method, zinc oxide single crystal, kinetic, growth mechanism