Chin. J. Semicond. > 1988, Volume 9 > Issue 3 > 244-254
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VLSI成品率统计中的缺陷成团效应及统计参数与面积的关系

张钟宣 and 李志坚

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    Received: 19 August 2015 Revised: Online: Published: 01 March 1988

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      Article Navigation >  Journal of Semiconductors  > 1988  >  9(3): 244-254
      张钟宣, 李志坚. VLSI成品率统计中的缺陷成团效应及统计参数与面积的关系[J]. 半导体学报(英文版), 1988, 9(3): 244-254.
      Citation:
      张钟宣, 李志坚. VLSI成品率统计中的缺陷成团效应及统计参数与面积的关系[J]. 半导体学报(英文版), 1988, 9(3): 244-254.
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      • Received Date: 2015-08-19

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