Chin. J. Semicond. > 1984, Volume 5 > Issue 6 > 621-630
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低压化学蒸汽淀积的三维计算机模拟

王季陶 , 张世理 , 王焕杰 and 连美华

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(6): 621-630
      王季陶, 张世理, 王焕杰, 连美华. 低压化学蒸汽淀积的三维计算机模拟[J]. 半导体学报(英文版), 1984, 5(6): 621-630.
      Citation:
      王季陶, 张世理, 王焕杰, 连美华. 低压化学蒸汽淀积的三维计算机模拟[J]. 半导体学报(英文版), 1984, 5(6): 621-630.
      shu

      • Received Date: 2015-08-20

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