Chin. J. Semicond. > 1986, Volume 7 > Issue 4 > 397-406
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质子注入直拉硅中缺陷的研究

李灿国 , 姚秀琛 and 秦国刚

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(4): 397-406
      李灿国, 姚秀琛, 秦国刚. 质子注入直拉硅中缺陷的研究[J]. 半导体学报(英文版), 1986, 7(4): 397-406.
      Citation:
      李灿国, 姚秀琛, 秦国刚. 质子注入直拉硅中缺陷的研究[J]. 半导体学报(英文版), 1986, 7(4): 397-406.
      shu

      • Received Date: 2015-08-20

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