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殷华湘, 徐秋霞. 体硅衬底上的CMOS Fin FET(英文)[J]. 半导体学报(英文版), 2003, 24(4): 351-356.
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Proportional views
Key words: FinFET, 凹槽, 设计, 制作, 器件特性, CMOS, 体硅
Article views: 2487 Times PDF downloads: 1576 Times Cited by: 0 Times
Received: 20 August 2015 Revised: Online: Published: 01 April 2003
Citation: |
殷华湘, 徐秋霞. 体硅衬底上的CMOS Fin FET(英文)[J]. 半导体学报(英文版), 2003, 24(4): 351-356.
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