Chin. J. Semicond. > 2003, Volume 24 > Issue 4 > 351-356

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Key words: FinFET, 凹槽, 设计, 制作, 器件特性, CMOS, 体硅

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2003

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      殷华湘, 徐秋霞. 体硅衬底上的CMOS Fin FET(英文)[J]. 半导体学报(英文版), 2003, 24(4): 351-356.
      Citation:
      殷华湘, 徐秋霞. 体硅衬底上的CMOS Fin FET(英文)[J]. 半导体学报(英文版), 2003, 24(4): 351-356.

      • Received Date: 2015-08-20

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