Chin. J. Semicond. > 1988, Volume 9 > Issue 3 > 325-327
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等离子刻蚀a-Si:H/a-C:H超晶格

王玉玲 and 张青

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    Received: 19 August 2015 Revised: Online: Published: 01 March 1988

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      Article Navigation >  Journal of Semiconductors  > 1988  >  9(3): 325-327
      王玉玲, 张青. 等离子刻蚀a-Si:H/a-C:H超晶格[J]. 半导体学报(英文版), 1988, 9(3): 325-327.
      Citation:
      王玉玲, 张青. 等离子刻蚀a-Si:H/a-C:H超晶格[J]. 半导体学报(英文版), 1988, 9(3): 325-327.
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      • Received Date: 2015-08-19

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