Chin. J. Semicond. > 2004, Volume 25 > Issue 1 > 82-86
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MEMS薄膜纵向断裂强度的静电测试结构模型与模拟

梅年松 and 黄庆安

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Key words: MEMS薄膜, 断裂强度, 静电测试结构, 数学模型

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(1): 82-86
      梅年松, 黄庆安. MEMS薄膜纵向断裂强度的静电测试结构模型与模拟[J]. 半导体学报(英文版), 2004, 25(1): 82-86.
      Citation:
      梅年松, 黄庆安. MEMS薄膜纵向断裂强度的静电测试结构模型与模拟[J]. 半导体学报(英文版), 2004, 25(1): 82-86.
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      • Received Date: 2015-08-19

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