Chin. J. Semicond. > 2002, Volume 23 > Issue 8 > 830-834
|

CONTENTS

硅基衬底Ba_(0.5)Sr_(0.5)TiO_3厚膜制备的Sol-gel新方法

王喆垚 , 刘建设 , 任天令 , 刘理天 and 李志坚

+ Author Affiliations

PDF

Key words: BST, 厚膜, MEMS, 溶胶-凝胶(sol-gel)

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2597 Times PDF downloads: 1196 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 August 2002

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2002  >  23(8): 830-834
      王喆垚, 刘建设, 任天令, 刘理天, 李志坚. 硅基衬底Ba_(0.5)Sr_(0.5)TiO_3厚膜制备的Sol-gel新方法[J]. 半导体学报(英文版), 2002, 23(8): 830-834.
      Citation:
      王喆垚, 刘建设, 任天令, 刘理天, 李志坚. 硅基衬底Ba_(0.5)Sr_(0.5)TiO_3厚膜制备的Sol-gel新方法[J]. 半导体学报(英文版), 2002, 23(8): 830-834.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return