Chin. J. Semicond. > 2000, Volume 21 > Issue 9 > 833-838

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Fabrication of 0.1 Micron MOSFETs and Their Characteristics

杨洸 and 刘理天

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Key words: MOSFETs

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    Received: 20 August 2015 Revised: Online: Published: 01 September 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(9): 833-838
      杨洸, 刘理天. Fabrication of 0.1 Micron MOSFETs and Their Characteristics[J]. 半导体学报(英文版), 2000, 21(9): 833-838.
      Citation:
      杨洸, 刘理天. Fabrication of 0.1 Micron MOSFETs and Their Characteristics[J]. 半导体学报(英文版), 2000, 21(9): 833-838.
      shu

      • Received Date: 2015-08-20

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