Citation: |
金维新, 孟宪光, 尤大伟, 胥兴才. 反应离子束刻蚀及其应用[J]. 半导体学报(英文版), 1983, 4(1): 97-100.
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References
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Received: 20 August 2015 Revised: Online: Published: 01 January 1983
Citation: |
金维新, 孟宪光, 尤大伟, 胥兴才. 反应离子束刻蚀及其应用[J]. 半导体学报(英文版), 1983, 4(1): 97-100.
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