Chin. J. Semicond. > 2001, Volume 22 > Issue 6 > 733-736
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采用微分电导法(R_□)评估POLY/SIS/Si界面状况

郑宜钧 and 贾永华

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Key words: 微分电导法, POLY/SIS/Si

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(6): 733-736
      郑宜钧, 贾永华. 采用微分电导法(R_□)评估POLY/SIS/Si界面状况[J]. 半导体学报(英文版), 2001, 22(6): 733-736.
      Citation:
      郑宜钧, 贾永华. 采用微分电导法(R_□)评估POLY/SIS/Si界面状况[J]. 半导体学报(英文版), 2001, 22(6): 733-736.
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      • Received Date: 2015-08-20

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