Chin. J. Semicond. > 2003, Volume 24 > Issue 8 > 866-870
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热激励硅谐振梁压力传感器闭环数据采集系统

范兆岩 , 崔大付 , 陈德勇 and 高晓童

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Key words: 硅梁, 数据采集系统, 闭环谐振

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    Received: 20 August 2015 Revised: Online: Published: 01 August 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(8): 866-870
      范兆岩, 崔大付, 陈德勇, 高晓童. 热激励硅谐振梁压力传感器闭环数据采集系统[J]. 半导体学报(英文版), 2003, 24(8): 866-870.
      Citation:
      范兆岩, 崔大付, 陈德勇, 高晓童. 热激励硅谐振梁压力传感器闭环数据采集系统[J]. 半导体学报(英文版), 2003, 24(8): 866-870.
      shu

      • Received Date: 2015-08-20

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