Chin. J. Semicond. > 2000, Volume 21 > Issue 3 > 250-254
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UHV/CVD生长SiGe/Si异质结构材料

成步文 , 李代宗 , 黄昌俊 , 于卓 , 张春晖 , 王玉田 , 余金中 and 王启明

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Key words: SiGe, 异质结, UHV/CVD

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    Received: 20 August 2015 Revised: Online: Published: 01 March 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(3): 250-254
      成步文, 李代宗, 黄昌俊, 于卓, 张春晖, 王玉田, 余金中, 王启明. UHV/CVD生长SiGe/Si异质结构材料[J]. 半导体学报(英文版), 2000, 21(3): 250-254.
      Citation:
      成步文, 李代宗, 黄昌俊, 于卓, 张春晖, 王玉田, 余金中, 王启明. UHV/CVD生长SiGe/Si异质结构材料[J]. 半导体学报(英文版), 2000, 21(3): 250-254.
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      • Received Date: 2015-08-20

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