Chin. J. Semicond. > 1993, Volume 14 > Issue 12 > 738-742
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Co—Si多层膜的透射电镜研究

顾诠 , 何杰 , 钱家骏 , 陈维德 and 许振嘉

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    Received: 20 August 2015 Revised: Online: Published: 01 December 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(12): 738-742
      顾诠, 何杰, 钱家骏, 陈维德, 许振嘉. Co—Si多层膜的透射电镜研究[J]. 半导体学报(英文版), 1993, 14(12): 738-742.
      Citation:
      顾诠, 何杰, 钱家骏, 陈维德, 许振嘉. Co—Si多层膜的透射电镜研究[J]. 半导体学报(英文版), 1993, 14(12): 738-742.
      shu

      • Received Date: 2015-08-20

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