Chin. J. Semicond. > 1988, Volume 9 > Issue 4 > 395-402
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注砷硅快速热退火过程研究

徐立 , 钱佩信 and 李志坚

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    Received: 19 August 2015 Revised: Online: Published: 01 April 1988

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      Article Navigation >  Journal of Semiconductors  > 1988  >  9(4): 395-402
      徐立, 钱佩信, 李志坚. 注砷硅快速热退火过程研究[J]. 半导体学报(英文版), 1988, 9(4): 395-402.
      Citation:
      徐立, 钱佩信, 李志坚. 注砷硅快速热退火过程研究[J]. 半导体学报(英文版), 1988, 9(4): 395-402.
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      • Received Date: 2015-08-19

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