Chin. J. Semicond. > 2004, Volume 25 > Issue 5 > 601-606
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一种用于标准单元版图交替移相掩模相位兼容性规则检查的工具

高根生 , 史峥 , 陈晔 and 严晓浪

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Key words: 交替移相掩模, 相位冲突图, 标准单元

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    Received: 19 August 2015 Revised: Online: Published: 01 May 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(5): 601-606
      高根生, 史峥, 陈晔, 严晓浪. 一种用于标准单元版图交替移相掩模相位兼容性规则检查的工具[J]. 半导体学报(英文版), 2004, 25(5): 601-606.
      Citation:
      高根生, 史峥, 陈晔, 严晓浪. 一种用于标准单元版图交替移相掩模相位兼容性规则检查的工具[J]. 半导体学报(英文版), 2004, 25(5): 601-606.
      shu

      • Received Date: 2015-08-19

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