Chin. J. Semicond. > 1993, Volume 14 > Issue 7 > 450-452
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用表面微机械加工技术制成的流速传感器

黄金彪 , 骆志强 , 冯耀兰 and 童勤义

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    Received: 20 August 2015 Revised: Online: Published: 01 July 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(7): 450-452
      黄金彪, 骆志强, 冯耀兰, 童勤义. 用表面微机械加工技术制成的流速传感器[J]. 半导体学报(英文版), 1993, 14(7): 450-452.
      Citation:
      黄金彪, 骆志强, 冯耀兰, 童勤义. 用表面微机械加工技术制成的流速传感器[J]. 半导体学报(英文版), 1993, 14(7): 450-452.
      shu

      • Received Date: 2015-08-20

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