Chin. J. Semicond. > 2004, Volume 25 > Issue 6 > 707-710

PDF

Key words: 表面微加工, 固支边界条件, 锚, 版图

  • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2234 Times PDF downloads: 1221 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 June 2004

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      戎华, 黄庆安, 聂萌, 李伟华. 一种能满足MEMS微梁固支边界条件的锚[J]. 半导体学报(英文版), 2004, 25(6): 707-710.
      Citation:
      戎华, 黄庆安, 聂萌, 李伟华. 一种能满足MEMS微梁固支边界条件的锚[J]. 半导体学报(英文版), 2004, 25(6): 707-710.

      • Received Date: 2015-08-19

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return