Citation: |
戎华, 黄庆安, 聂萌, 李伟华. 一种能满足MEMS微梁固支边界条件的锚[J]. 半导体学报(英文版), 2004, 25(6): 707-710.
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Key words: 表面微加工, 固支边界条件, 锚, 版图
Article views: 2234 Times PDF downloads: 1221 Times Cited by: 0 Times
Received: 19 August 2015 Revised: Online: Published: 01 June 2004
Citation: |
戎华, 黄庆安, 聂萌, 李伟华. 一种能满足MEMS微梁固支边界条件的锚[J]. 半导体学报(英文版), 2004, 25(6): 707-710.
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