Chin. J. Semicond. > 2004, Volume 25 > Issue 2 > 195-199
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低串扰平顶型刻蚀衍射光栅解复用器的设计

宋军 , 石志敏 and 何赛灵

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Key words: 刻蚀衍射光栅, 频谱平坦化, 串扰, 色散

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(2): 195-199
      宋军, 石志敏, 何赛灵. 低串扰平顶型刻蚀衍射光栅解复用器的设计[J]. 半导体学报(英文版), 2004, 25(2): 195-199.
      Citation:
      宋军, 石志敏, 何赛灵. 低串扰平顶型刻蚀衍射光栅解复用器的设计[J]. 半导体学报(英文版), 2004, 25(2): 195-199.
      shu

      • Received Date: 2015-08-19

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