Chin. J. Semicond. > 2005, Volume 26 > Issue 8 > 1572-1576
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YAG激光晶化多晶硅

刘建平 , 王海文 , 李娟 , 张德坤 , 赵淑云 , 吴春亚 , 熊绍珍 and 张丽珠

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Key words: YAG脉冲激光, 激光晶化, 微晶硅

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    Received: 18 August 2015 Revised: Online: Published: 01 August 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(8): 1572-1576
      刘建平, 王海文, 李娟, 张德坤, 赵淑云, 吴春亚, 熊绍珍, 张丽珠. YAG激光晶化多晶硅[J]. 半导体学报(英文版), 2005, 26(8): 1572-1576.
      Citation:
      刘建平, 王海文, 李娟, 张德坤, 赵淑云, 吴春亚, 熊绍珍, 张丽珠. YAG激光晶化多晶硅[J]. 半导体学报(英文版), 2005, 26(8): 1572-1576.
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      • Received Date: 2015-08-18

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