Chin. J. Semicond. > 1986, Volume 7 > Issue 5 > 561-564

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电化学法测定Si多层结构材料浓度分布

陈自姚 , 邵永富 and 朱福英

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(5): 561-564
      陈自姚, 邵永富, 朱福英. 电化学法测定Si多层结构材料浓度分布[J]. 半导体学报(英文版), 1986, 7(5): 561-564.
      Citation:
      陈自姚, 邵永富, 朱福英. 电化学法测定Si多层结构材料浓度分布[J]. 半导体学报(英文版), 1986, 7(5): 561-564.
      shu

      • Received Date: 2015-08-20

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