Chin. J. Semicond. > 1991, Volume 12 > Issue 9 > 555-560
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掺磷氢化硅低温微晶化的研究

耿新华 , 孟志国 , 陆靖谷 , 孙钟林 and 徐温元

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(9): 555-560
      耿新华, 孟志国, 陆靖谷, 孙钟林, 徐温元. 掺磷氢化硅低温微晶化的研究[J]. 半导体学报(英文版), 1991, 12(9): 555-560.
      Citation:
      耿新华, 孟志国, 陆靖谷, 孙钟林, 徐温元. 掺磷氢化硅低温微晶化的研究[J]. 半导体学报(英文版), 1991, 12(9): 555-560.
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      • Received Date: 2015-08-19

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