Chin. J. Semicond. > 2002, Volume 23 > Issue 10 > 1098-1101
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微型电光探针的研制

李海兰 , 贾刚 , 张晓婷 , 周志雄 and 陈占国

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Key words: 湿法腐蚀, 电光检测, 电光探针

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(10): 1098-1101
      李海兰, 贾刚, 张晓婷, 周志雄, 陈占国. 微型电光探针的研制[J]. 半导体学报(英文版), 2002, 23(10): 1098-1101.
      Citation:
      李海兰, 贾刚, 张晓婷, 周志雄, 陈占国. 微型电光探针的研制[J]. 半导体学报(英文版), 2002, 23(10): 1098-1101.
      shu

      • Received Date: 2015-08-19

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