Capacitive Microwave MEMS Switch

Zhang Jinwen , Jin Yufeng , Hao Yilong , Wang Wei , Tian Dayu and and Wang Yangyuan

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Key words: capacitive, microwave MEMS switch, Ta2O5 thin film

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Received: 18 August 2015 Revised: Online: Published: 01 September 2005

Article Navigation > Journal of Semiconductors > 2005 > 26(9): 1727-1730

Zhang Jinwen, Jin Yufeng, Hao Yilong, Wang Wei, Tian Dayu, and Wang Yangyuan. Capacitive Microwave MEMS Switch[J]. 半导体学报(英文版), 2005, 26(9): 1727-1730.

Citation:

Zhang Jinwen, Jin Yufeng, Hao Yilong, Wang Wei, Tian Dayu, and Wang Yangyuan. Capacitive Microwave MEMS Switch[J]. 半导体学报(英文版), 2005, 26(9): 1727-1730.

Zhang Jinwen, Jin Yufeng, Hao Yilong, Wang Wei, Tian Dayu, and Wang Yangyuan. Capacitive Microwave MEMS Switch[J]. 半导体学报(英文版), 2005, 26(9): 1727-1730.

Citation:

Zhang Jinwen, Jin Yufeng, Hao Yilong, Wang Wei, Tian Dayu, and Wang Yangyuan. Capacitive Microwave MEMS Switch[J]. 半导体学报(英文版), 2005, 26(9): 1727-1730.

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