Chin. J. Semicond. > 2005, Volume 26 > Issue 9 > 1698-1704
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A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure

Wu Wengang , Chen Qinghua , Yin Dongqing , Yan Guizhen , Chen Zhangyuan , Hao Yilong and and Xu Anshi

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Key words: micromirror, hybrid electrostatic driving structure, planar plate drive, vertical comb drive, mixed silicon micromachining

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    Received: 18 August 2015 Revised: Online: Published: 01 September 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(9): 1698-1704
      Wu Wengang, Chen Qinghua, Yin Dongqing, Yan Guizhen, Chen Zhangyuan, Hao Yilong, and Xu Anshi. A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure[J]. 半导体学报(英文版), 2005, 26(9): 1698-1704.
      Citation:
      Wu Wengang, Chen Qinghua, Yin Dongqing, Yan Guizhen, Chen Zhangyuan, Hao Yilong, and Xu Anshi. A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure[J]. 半导体学报(英文版), 2005, 26(9): 1698-1704.
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      • Received Date: 2015-08-18

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