Chin. J. Semicond. > 2003, Volume 24 > Issue 11 > 1190-1195
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悬臂式RF MEMS开关的设计与研制

郭方敏 , 赖宗声 , 朱自强 , 贾铭 , 初建朋 , 范忠 , 朱荣锦 , 戈肖鸿 , 杨根庆 and 陆卫

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Key words: 悬臂梁, 插入损耗, 隔离度, ANSYS软件, 阈值电压

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    Received: 20 August 2015 Revised: Online: Published: 01 November 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(11): 1190-1195
      郭方敏, 赖宗声, 朱自强, 贾铭, 初建朋, 范忠, 朱荣锦, 戈肖鸿, 杨根庆, 陆卫. 悬臂式RF MEMS开关的设计与研制[J]. 半导体学报(英文版), 2003, 24(11): 1190-1195.
      Citation:
      郭方敏, 赖宗声, 朱自强, 贾铭, 初建朋, 范忠, 朱荣锦, 戈肖鸿, 杨根庆, 陆卫. 悬臂式RF MEMS开关的设计与研制[J]. 半导体学报(英文版), 2003, 24(11): 1190-1195.
      shu

      • Received Date: 2015-08-20

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