Chin. J. Semicond. > 2002, Volume 23 > Issue 7 > 673-680

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碳化硅电力电子器件及其制造工艺新进展

陈治明

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Key words: 碳化硅, 电力电子器件, 器件工艺

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    Received: 19 August 2015 Revised: Online: Published: 01 July 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(7): 673-680
      陈治明. 碳化硅电力电子器件及其制造工艺新进展[J]. 半导体学报(英文版), 2002, 23(7): 673-680.
      Citation:
      陈治明. 碳化硅电力电子器件及其制造工艺新进展[J]. 半导体学报(英文版), 2002, 23(7): 673-680.
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      • Received Date: 2015-08-19

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