Chin. J. Semicond. > 1995, Volume 16 > Issue 10 > 789-793
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直拉硅单晶中热施主的快速热退除

栾洪发，张果虎，李兵，陈学清，秦福，钱佩信

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    Received: 19 August 2015 Revised: Online: Published: 01 October 1995

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      Article Navigation >  Journal of Semiconductors  > 1995  >  16(10): 789-793
      栾洪发，张果虎，李兵，陈学清，秦福，钱佩信. 直拉硅单晶中热施主的快速热退除[J]. 半导体学报(英文版), 1995, 16(10): 789-793.
      Citation:
      栾洪发，张果虎，李兵，陈学清，秦福，钱佩信. 直拉硅单晶中热施主的快速热退除[J]. 半导体学报(英文版), 1995, 16(10): 789-793.
      shu

      • Received Date: 2015-08-19

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