Chin. J. Semicond. > 1993, Volume 14 > Issue 1 > 36-42
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双层金属布线硅栅CMOS门阵列电路制造工艺技术研究

郑养鉥 , 张敏 , 凌栋忠 , 吴璘 , 顾惠芬 , 郑庆云 and 邱斌

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(1): 36-42
      郑养鉥, 张敏, 凌栋忠, 吴璘, 顾惠芬, 郑庆云, 邱斌. 双层金属布线硅栅CMOS门阵列电路制造工艺技术研究[J]. 半导体学报(英文版), 1993, 14(1): 36-42.
      Citation:
      郑养鉥, 张敏, 凌栋忠, 吴璘, 顾惠芬, 郑庆云, 邱斌. 双层金属布线硅栅CMOS门阵列电路制造工艺技术研究[J]. 半导体学报(英文版), 1993, 14(1): 36-42.
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      • Received Date: 2015-08-20

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