Chin. J. Semicond. > 2004, Volume 25 > Issue 8 > 967-971
|

CONTENTS

低能离子束方法制备重掺杂Fe的Si∶Fe固溶体

刘力锋 , 陈诺夫 , 张富强 , 陈晨龙 , 李艳丽 , 杨少延 and 刘志凯

+ Author Affiliations

PDF

Key words: 硅, 铁, 低能离子束, 重掺杂

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2427 Times PDF downloads: 1163 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 August 2004

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2004  >  25(8): 967-971
      刘力锋, 陈诺夫, 张富强, 陈晨龙, 李艳丽, 杨少延, 刘志凯. 低能离子束方法制备重掺杂Fe的Si∶Fe固溶体[J]. 半导体学报(英文版), 2004, 25(8): 967-971.
      Citation:
      刘力锋, 陈诺夫, 张富强, 陈晨龙, 李艳丽, 杨少延, 刘志凯. 低能离子束方法制备重掺杂Fe的Si∶Fe固溶体[J]. 半导体学报(英文版), 2004, 25(8): 967-971.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return