Chin. J. Semicond. > 1983, Volume 4 > Issue 2 > 133-141
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掺氢和掺氟无定形硅的EHMO研究

蒋平

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(2): 133-141
      蒋平. 掺氢和掺氟无定形硅的EHMO研究[J]. 半导体学报(英文版), 1983, 4(2): 133-141.
      Citation:
      蒋平. 掺氢和掺氟无定形硅的EHMO研究[J]. 半导体学报(英文版), 1983, 4(2): 133-141.
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      • Received Date: 2015-08-20

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