Chin. J. Semicond. > 2002, Volume 23 > Issue 3 > 285-289
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高温退火非掺杂磷化铟制备半绝缘材料(英文)

赵有文 , 董宏伟 , 焦景华 , 赵建群 , 林兰英 , 孙聂枫 and 孙同年

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Key words: 磷化铟, 半绝缘, 退火

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    Received: 19 August 2015 Revised: Online: Published: 01 March 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(3): 285-289
      赵有文, 董宏伟, 焦景华, 赵建群, 林兰英, 孙聂枫, 孙同年. 高温退火非掺杂磷化铟制备半绝缘材料(英文)[J]. 半导体学报(英文版), 2002, 23(3): 285-289.
      Citation:
      赵有文, 董宏伟, 焦景华, 赵建群, 林兰英, 孙聂枫, 孙同年. 高温退火非掺杂磷化铟制备半绝缘材料(英文)[J]. 半导体学报(英文版), 2002, 23(3): 285-289.
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      • Received Date: 2015-08-19

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