Chin. J. Semicond. > 2004, Volume 25 > Issue 11 > 1537-1543
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静电执行的MEMS多层膜材料参数在线提取方法

聂萌 , 黄庆安 , 王建华 , 戎华 and 李伟华

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Key words: 两端固支梁, 吸合, 材料参数提取, 模拟

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    Received: 19 August 2015 Revised: Online: Published: 01 November 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(11): 1537-1543
      聂萌, 黄庆安, 王建华, 戎华, 李伟华. 静电执行的MEMS多层膜材料参数在线提取方法[J]. 半导体学报(英文版), 2004, 25(11): 1537-1543.
      Citation:
      聂萌, 黄庆安, 王建华, 戎华, 李伟华. 静电执行的MEMS多层膜材料参数在线提取方法[J]. 半导体学报(英文版), 2004, 25(11): 1537-1543.
      shu

      • Received Date: 2015-08-19

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