Chin. J. Semicond. > 2001, Volume 22 > Issue 12 > 1551-1556
|

CONTENTS

MEMS光开关

梁春广 , 徐永青 and 杨拥军

+ Author Affiliations

PDF

Key words: 微机械, 光开关, 硅-玻璃键合

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2615 Times PDF downloads: 1539 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 December 2001

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2001  >  22(12): 1551-1556
      梁春广, 徐永青, 杨拥军. MEMS光开关[J]. 半导体学报(英文版), 2001, 22(12): 1551-1556.
      Citation:
      梁春广, 徐永青, 杨拥军. MEMS光开关[J]. 半导体学报(英文版), 2001, 22(12): 1551-1556.
      shu

      • Received Date: 2015-08-20

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return