Chin. J. Semicond. > 1991, Volume 12 > Issue 5 > 257-264

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电荷DLTS及其对硅上砷化镓材料中深能级的测量

董琪 , 郑心畬 , 陈培毅 and 费新礴

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    Received: 19 August 2015 Revised: Online: Published: 01 May 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(5): 257-264
      董琪, 郑心畬, 陈培毅, 费新礴. 电荷DLTS及其对硅上砷化镓材料中深能级的测量[J]. 半导体学报(英文版), 1991, 12(5): 257-264.
      Citation:
      董琪, 郑心畬, 陈培毅, 费新礴. 电荷DLTS及其对硅上砷化镓材料中深能级的测量[J]. 半导体学报(英文版), 1991, 12(5): 257-264.
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      • Received Date: 2015-08-19

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