刘京, 茹国平, 顾志光, 屈新萍, 李炳宗, 朱剑豪. TiN覆盖层和Co/Ti/Si三元固相反应改善超薄CoSi_2高温稳定性[J]. 半导体学报(英文版), 1998, 19(3): 214-217.

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Received: 20 August 2015 Revised: Online: Published: 01 March 1998
Citation: |
刘京, 茹国平, 顾志光, 屈新萍, 李炳宗, 朱剑豪. TiN覆盖层和Co/Ti/Si三元固相反应改善超薄CoSi_2高温稳定性[J]. 半导体学报(英文版), 1998, 19(3): 214-217.
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