Chin. J. Semicond. > 2004, Volume 25 > Issue 6 > 682-686
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斜置式方形探针测量单晶断面电阻率分布mapping技术

张艳辉 , 孙以材 , 刘新福 and 陈志永

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Key words: 四探针技术, 电阻率测量, 游移, Rymaszewski测试法

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(6): 682-686
      张艳辉, 孙以材, 刘新福, 陈志永. 斜置式方形探针测量单晶断面电阻率分布mapping技术[J]. 半导体学报(英文版), 2004, 25(6): 682-686.
      Citation:
      张艳辉, 孙以材, 刘新福, 陈志永. 斜置式方形探针测量单晶断面电阻率分布mapping技术[J]. 半导体学报(英文版), 2004, 25(6): 682-686.
      shu

      • Received Date: 2015-08-19

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