A Novel Large-Scale Electromagnetically Actuated MEMS Optical Scanning Mirror

Mu Canjun; Zhang Feiling; Wu Yaming

J. Semicond. > 2008, Volume 29 > Issue 3 > 583-587

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A Novel Large-Scale Electromagnetically Actuated MEMS Optical Scanning Mirror

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Abstract: A novel configuration of an electromagnetically actuated MEMS optical scanning mirror with a large mirror area of 6mm×4mm is designed,fabricated,and characterized.This optical scanning mirror based on a silicon plate,in which a set of micro-coils for actuation are adhered to the back side of the mirror using the electroplating technique,is immersed in the magnetic field produced by the magnetic circuit,including a permanent magnet.The mirror rotates around one pair of torsion bars when the driving current signal is applied on the driving coils.This device,fabricated using silicon bulk processing and the electroplating technique,shows excellent performance.The slope of optical steering deflection of this device is 0.03°/mA,the optical deflection angle is 1e2. under a resonant frequency of 381Hz at a lower power consumption of ＜1mW,and theQfactor in air is 221.Additionally,the MEMS scanning mirror as a precise optics element presents good surface roughness of mirror and high reflectivity,so it can be applied in scanning systems such as high speed micro-spectrometers and optical tunable filters in optical communication.

Key words: micro-electronic mechanical system, large-scale optical scanning mirror, electromagnetically actuation, large rotation angle, optical reflectivity

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Mu Canjun, Zhang Feiling, Wu Yaming. A Novel Large-Scale Electromagnetically Actuated MEMS Optical Scanning Mirror[J]. Journal of Semiconductors, 2008, 29(3): 583-587.

Mu C J, Zhang F L, Wu Y M. A Novel Large-Scale Electromagnetically Actuated MEMS Optical Scanning Mirror[J]. J. Semicond., 2008, 29(3): 583.

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Received: 18 August 2015 Revised: 22 October 2007 Online: Published: 01 March 2008

A novel configuration of an electromagnetically actuated MEMS optical scanning mirror with a large mirror area of 6mm×4mm is designed,fabricated,and characterized.This optical scanning mirror based on a silicon plate,in which a set of micro-coils for actuation are adhered to the back side of the mirror using the electroplating technique,is immersed in the magnetic field produced by the magnetic circuit,including a permanent magnet.The mirror rotates around one pair of torsion bars when the driving current signal is applied on the driving coils.This device,fabricated using silicon bulk processing and the electroplating technique,shows excellent performance.The slope of optical steering deflection of this device is 0.03°/mA,the optical deflection angle is 1e2. under a resonant frequency of 381Hz at a lower power consumption of ＜1mW,and theQfactor in air is 221.Additionally,the MEMS scanning mirror as a precise optics element presents good surface roughness of mirror and high reflectivity,so it can be applied in scanning systems such as high speed micro-spectrometers and optical tunable filters in optical communication.

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