Chin. J. Semicond. > 1992, Volume 13 > Issue 1 > 55-61
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μc-Si:H/a-Si:H多层膜的制备及性质

郑家贵 , 冯良桓 , 蔡伟 , 黄天荃 , 蔡亚平 , 罗昭和 and 周心明

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    Received: 19 August 2015 Revised: Online: Published: 01 January 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(1): 55-61
      郑家贵, 冯良桓, 蔡伟, 黄天荃, 蔡亚平, 罗昭和, 周心明. μc-Si:H/a-Si:H多层膜的制备及性质[J]. 半导体学报(英文版), 1992, 13(1): 55-61.
      Citation:
      郑家贵, 冯良桓, 蔡伟, 黄天荃, 蔡亚平, 罗昭和, 周心明. μc-Si:H/a-Si:H多层膜的制备及性质[J]. 半导体学报(英文版), 1992, 13(1): 55-61.
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      • Received Date: 2015-08-19

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