| Citation: |
Wang Yue, Wu Yuanda, Li Jianguang, An Junming, Wang Hongjie, Yin Xiaojie, Zhang Jiashun, Hu Xiongwei. Fabrication of Hybrid Sol-Gel SiO2 Optical Waveguide Devices by UV-Light Imprinting[J]. Journal of Semiconductors, 2007, 28(7): 1130-1133.
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Wang Y, Wu Yuanda, Li J G, An J M, Wang H J, Yin X J, Zhang J S, Hu X W. Fabrication of Hybrid Sol-Gel SiO2 Optical Waveguide Devices by UV-Light Imprinting[J]. Chin. J. Semicond., 2007, 28(7): 1130.
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Fabrication of Hybrid Sol-Gel SiO2 Optical Waveguide Devices by UV-Light Imprinting
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Abstract
Photosensitive sol-gel SiO2 materials were synthesized by the organic-inorganic hybrid method,and were spun on silicon substrate.The effects of UV-light exposure time and the postbake temperature and time on the refractive index and depth of the films were investigated.1×2 and 1×4 MMI splitters were fabricated by means of UV-light imprinting technology,and good mode profiles were measured.-
Keywords:
- sol-gel,
- UV-light imprinting,
- hybridization,
- optical waveguide
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References
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