Chin. J. Semicond. > 2004, Volume 25 > Issue 1 > 73-76
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多台阶介质槽隔离的SiCOI

龚欣 , 张进城 and 郝跃

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Key words: SiCOI MESFET, 多台阶介质槽隔离, 击穿电压

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(1): 73-76
      龚欣, 张进城, 郝跃. 多台阶介质槽隔离的SiCOI[J]. 半导体学报(英文版), 2004, 25(1): 73-76.
      Citation:
      龚欣, 张进城, 郝跃. 多台阶介质槽隔离的SiCOI[J]. 半导体学报(英文版), 2004, 25(1): 73-76.
      shu

      • Received Date: 2015-08-19

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