Chin. J. Semicond. > 1980, Volume 1 > Issue 4 > 286-291
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用反射光谱鉴定蓝宝石(或尖晶石)衬底上外延硅膜

半导体光学性质小组

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1980

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      Article Navigation >  Journal of Semiconductors  > 1980  >  1(4): 286-291
      半导体光学性质小组. 用反射光谱鉴定蓝宝石(或尖晶石)衬底上外延硅膜[J]. 半导体学报(英文版), 1980, 1(4): 286-291.
      Citation:
      半导体光学性质小组. 用反射光谱鉴定蓝宝石(或尖晶石)衬底上外延硅膜[J]. 半导体学报(英文版), 1980, 1(4): 286-291.
      shu

      • Received Date: 2015-08-20

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