Citation: |
钱佩信, 马腾阁, 山静, 赵寅鹏, 陈必贤, 林惠旺. 三维CMOS集成电路工艺及其性能研究[J]. 半导体学报(英文版), 1986, 7(6): 582-588.
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References
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Proportional views
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Received: 20 August 2015 Revised: Online: Published: 01 June 1986
Citation: |
钱佩信, 马腾阁, 山静, 赵寅鹏, 陈必贤, 林惠旺. 三维CMOS集成电路工艺及其性能研究[J]. 半导体学报(英文版), 1986, 7(6): 582-588.
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