Chin. J. Semicond. > 2004, Volume 25 > Issue 10 > 1324-1330
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SOI热光开关调制区结构与速度和功耗关系的有限元法分析

刘敬伟 , 王小龙 , 陈少武 and 余金中

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Key words: 有限元法, SOI热光开关, 开关速度, 功耗

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(10): 1324-1330
      刘敬伟, 王小龙, 陈少武, 余金中. SOI热光开关调制区结构与速度和功耗关系的有限元法分析[J]. 半导体学报(英文版), 2004, 25(10): 1324-1330.
      Citation:
      刘敬伟, 王小龙, 陈少武, 余金中. SOI热光开关调制区结构与速度和功耗关系的有限元法分析[J]. 半导体学报(英文版), 2004, 25(10): 1324-1330.
      shu

      • Received Date: 2015-08-19

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