Chin. J. Semicond. > 2004, Volume 25 > Issue 10 > 1249-1252
|

CONTENTS

应用双电场减小阳极键合过程中MEMS器件可动部件的损伤(英文)

杨道虹 , 徐晨 and 沈光地

+ Author Affiliations

PDF

Key words: 微电子机械系统, 阳极键合, 双电场

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2350 Times PDF downloads: 1107 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 October 2004

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2004  >  25(10): 1249-1252
      杨道虹, 徐晨, 沈光地. 应用双电场减小阳极键合过程中MEMS器件可动部件的损伤(英文)[J]. 半导体学报(英文版), 2004, 25(10): 1249-1252.
      Citation:
      杨道虹, 徐晨, 沈光地. 应用双电场减小阳极键合过程中MEMS器件可动部件的损伤(英文)[J]. 半导体学报(英文版), 2004, 25(10): 1249-1252.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return