Chin. J. Semicond. > 1983, Volume 4 > Issue 1 > 81-85
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9微来红外吸收法测定硅单晶中氧含量的标定曲线

李月珍 , 何焕南 , 赵关弟 , 严荣华 , 吕庆仁 , 祁明维 , 章家鼎 and 华芝芬

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(1): 81-85
      李月珍, 何焕南, 赵关弟, 严荣华, 吕庆仁, 祁明维, 章家鼎, 华芝芬. 9微来红外吸收法测定硅单晶中氧含量的标定曲线[J]. 半导体学报(英文版), 1983, 4(1): 81-85.
      Citation:
      李月珍, 何焕南, 赵关弟, 严荣华, 吕庆仁, 祁明维, 章家鼎, 华芝芬. 9微来红外吸收法测定硅单晶中氧含量的标定曲线[J]. 半导体学报(英文版), 1983, 4(1): 81-85.
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      • Received Date: 2015-08-20

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