Chin. J. Semicond. > 2003, Volume 24 > Issue 9 > 942-945

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Key words: 电化学腐蚀, 多孔SiC薄膜, 蓝光发射, PL, SEM

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    Received: 20 August 2015 Revised: Online: Published: 01 September 2003

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      张志敏, 谢二庆, 林洪峰, 马紫微, 叶凡, 贺德衍. 多孔β-SiC薄膜的蓝光发射[J]. 半导体学报(英文版), 2003, 24(9): 942-945.
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      张志敏, 谢二庆, 林洪峰, 马紫微, 叶凡, 贺德衍. 多孔β-SiC薄膜的蓝光发射[J]. 半导体学报(英文版), 2003, 24(9): 942-945.

      • Received Date: 2015-08-20

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