Chin. J. Semicond. > 2003, Volume 24 > Issue 9 > 986-990

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Key words: SOI器件, 短沟效应, 结构优化

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    Received: 20 August 2015 Revised: Online: Published: 01 September 2003

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      王文平, 黄如, 张国艳. 亚100nm SOI器件的结构优化分析[J]. 半导体学报(英文版), 2003, 24(9): 986-990.
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      王文平, 黄如, 张国艳. 亚100nm SOI器件的结构优化分析[J]. 半导体学报(英文版), 2003, 24(9): 986-990.

      • Received Date: 2015-08-20

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