Chin. J. Semicond. > 2003, Volume 24 > Issue 9 > 986-990
|

CONTENTS

亚100nm SOI器件的结构优化分析

王文平 , 黄如 and 张国艳

+ Author Affiliations

PDF

Key words: SOI器件, 短沟效应, 结构优化

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2403 Times PDF downloads: 1105 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 September 2003

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2003  >  24(9): 986-990
      王文平, 黄如, 张国艳. 亚100nm SOI器件的结构优化分析[J]. 半导体学报(英文版), 2003, 24(9): 986-990.
      Citation:
      王文平, 黄如, 张国艳. 亚100nm SOI器件的结构优化分析[J]. 半导体学报(英文版), 2003, 24(9): 986-990.
      shu

      • Received Date: 2015-08-20

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return