Chin. J. Semicond. > 2002, Volume 23 > Issue 4 > 377-381
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p型微氮直拉硅中氧施主的电学特性

余学功 , 杨德仁 , 马向阳 , 汤艳 , 李东升 , 李立本 and 阙端麟

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Key words: 直拉硅, 氮氧复合体, 热施主

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(4): 377-381
      余学功, 杨德仁, 马向阳, 汤艳, 李东升, 李立本, 阙端麟. p型微氮直拉硅中氧施主的电学特性[J]. 半导体学报(英文版), 2002, 23(4): 377-381.
      Citation:
      余学功, 杨德仁, 马向阳, 汤艳, 李东升, 李立本, 阙端麟. p型微氮直拉硅中氧施主的电学特性[J]. 半导体学报(英文版), 2002, 23(4): 377-381.
      shu

      • Received Date: 2015-08-19

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